Application area
※ Semiconductor, photovoltaic, display screen, plasma processing, coating, drying and other industries
Product features
※ Use efficient and low-noise high-speed motors to achieve optimal pumping speed;
※ The machine and pump share the same shaft, without efficiency loss, achieve low power consumption and high efficiency;
※ Small size and small footprint;
※ Localized production with high cost-effectiveness;
※ Advanced temperature control design;
※ Intelligent control interface operating system;
※ Excellent dust filtration ability
VS Equal pitch
| Model | VS250 | VS700 | VS1400 | VS2000 | |
|---|---|---|---|---|---|
| Ultimate pressure | Torr | 3.75E-03 | 7.50E-04 | ||
| Pa | 0.5 | 0.1 | |||
| Pumping Speed | m3/h | 250 | 700 | 1400 | 2000 |
| l/min | 4160 | 11660 | 23330 | 33330 | |
| Cooling water | l/min | ≥7 | |||
| Power | kW | 2.6 | 3 | 3.4 | 3.6 |
| Sweeping gas | l/min | 0 ~ 50 | |||
| Power supply | 3Φ 380V 50Hz | ||||
| Weight | kg | 180 | 300 | 380 | 420 |
| Noise | dBA | ≤70 | |||
| Connection Flange (In) | ISO80 | ISO100 | ISO160 | ||
| Connection Flange (Out) | NW40 | ||||
| Size | mm | 780x410x560 | 780x410x800 | 920x410x1065 |
VD Variable pitch
| Model | VD250 | VD350 | VD650 | VD700 | VD1400 | VD2000 | VD2600 | VD4200 | |
|---|---|---|---|---|---|---|---|---|---|
| Ultimate pressure | Torr | 3.75E-03 | 7.50E-04 | ||||||
| Pa | 0.5 | 0.1 | |||||||
| Pumping Speed | m3/h | 250 | 350 | 650 | 700 | 1400 | 2000 | 2600 | 4200 |
| l/min | 4160 | 5830 | 10830 | 11660 | 23330 | 33330 | 43330 | 70000 | |
| Cooling water | l/min | ≥7 | ≥10 | ≥15 | |||||
| Power | kW | 4.2 | 5 | 11 | 4.5 | 4.8 | 5.2 | 6.1 | 12.2 |
| Sweeping gas | l/min | 0 ~ 50 | 0 ~ 100 | ||||||
| Power supply | 3Φ 380V 50Hz | ||||||||
| Weight | kg | 280 | 300 | 620 | 500 | 550 | 650 | 700 | 1160 |
| Noise | dBA | ≤70 | ≤75 | ||||||
| Connection Flange (In) | ISO80 | ISO100 | ISO160 | ISO200 | |||||
| Connection Flange (Out) | NW40 | NW50 | |||||||
| Size | mm | 800x450x600 | 950x450x650 | 1120x550x700 | 830x450x930 | 900x450x960 | 1000x450x1020 | 1220x550x1160 |
VS Equal pitch
| Model | VS250 | VS700 | VS1400 | VS2000 | |
|---|---|---|---|---|---|
| Ultimate pressure | Torr | 3.75E-03 | 7.50E-04 | ||
| Pa | 0.5 | 0.1 | |||
| Pumping Speed | m3/h | 250 | 700 | 1400 | 2000 |
| l/min | 4160 | 11660 | 23330 | 33330 | |
| Cooling water | l/min | ≥7 | |||
| Power | kW | 2.6 | 3 | 3.4 | 3.6 |
| Sweeping gas | l/min | 0 ~ 50 | |||
| Power supply | 3Φ 380V 50Hz | ||||
| Weight | kg | 180 | 300 | 380 | 420 |
| Noise | dBA | ≤70 | |||
| Connection Flange (In) | ISO80 | ISO100 | ISO160 | ||
| Connection Flange (Out) | NW40 | ||||
| Size | mm | 780x410x560 | 780x410x800 | 920x410x1065 |
VD Variable pitch
| Model | VD250 | VD350 | VD650 | VD700 | VD1400 | VD2000 | VD2600 | VD4200 | |
|---|---|---|---|---|---|---|---|---|---|
| Ultimate pressure | Torr | 3.75E-03 | 7.50E-04 | ||||||
| Pa | 0.5 | 0.1 | |||||||
| Pumping Speed | m3/h | 250 | 350 | 650 | 700 | 1400 | 2000 | 2600 | 4200 |
| l/min | 4160 | 5830 | 10830 | 11660 | 23330 | 33330 | 43330 | 70000 | |
| Cooling water | l/min | ≥7 | ≥10 | ≥15 | |||||
| Power | kW | 4.2 | 5 | 11 | 4.5 | 4.8 | 5.2 | 6.1 | 12.2 |
| Sweeping gas | l/min | 0 ~ 50 | 0 ~ 100 | ||||||
| Power supply | 3Φ 380V 50Hz | ||||||||
| Weight | kg | 280 | 300 | 620 | 500 | 550 | 650 | 700 | 1160 |
| Noise | dBA | ≤70 | ≤75 | ||||||
| Connection Flange (In) | ISO80 | ISO100 | ISO160 | ISO200 | |||||
| Connection Flange (Out) | NW40 | NW50 | |||||||
| Size | mm | 800x450x600 | 950x450x650 | 1120x550x700 | 830x450x930 | 900x450x960 | 1000x450x1020 | 1220x550x1160 |
+86 010-64730110
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